Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications
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ShareCopied to clipboardFundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications is a book. It was written by Marc J. Madou and published by Taylor&Francis in 2012.
Key facts
- author: Marc J. Madou
- publication date: 2012
- book publisher: Taylor&Francis
- book series: unknown
- book subjects: Nanoelectromechanical systems, BioMEMS
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"Fundamentals of microfabrication and nanotechnology. Volume III, From MEMS to bio-MEMS and bio-NEMS : manufacturing techniques and applications" is one of the books by Marc J. Madou, books by Taylor&Francis and 2,617,384 books in our database.
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