X-ray lithography
X-ray lithography is a book subject. It includes 3 books, written by 3 different authors.
Key facts
- number of authors: 3 people
- number of books: 3
- books: Patterning of material layers in submicron region, Resists in microlithography and printing, The physics of submicron lithography
- authors: U. S. Tandon, Bohumil Bednár, Kamilʹ Akhmetovich Valiev
- publication dates: 1993, 1993, 1992
- book publishers: Wiley, North-Holland Biomedical Press, Plenum Press
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"X-ray lithography" is one of the 293,135 book subjects in our database.
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This dashboard is based on data from: The British Library.
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