Semiconductors-Etching
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ShareCopied to clipboardSemiconductors-Etching is a book subject. It includes 12 books, written by 11 different authors.
Key facts
- number of authors: 11 people
- number of books: 12
- books: Advanced processes for 193-nm immersion lithography, Atomic layer processing : semiconductor dry etching technology, Ätzverfahren für die Mikrotechnik
- authors: Yayi Wei, Thorsten Lill, J. Michael Köhler
- publication dates: 2009, 2021, 1998
- book publishers: Eurospan, Wiley-VCH
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"Semiconductors-Etching" is one of the 293,135 book subjects in our database.
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This dashboard is based on data from: The British Library.
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