Plasma etching
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ShareCopied to clipboardPlasma etching is a book subject. It includes 12 books, written by 10 different authors.
Key facts
- number of authors: 10 people
- number of books: 12
- books: Dry etching for VSLI, Dry etching technology for semiconductors, Feature profile evolution in plasma processing using on-wafer monitoring system
- authors: A. J. van Roosmalen, Kazuo Nojiri, Seiji Samukawa
- publication dates: 1991, 2014, 2014
- book publishers: Plenum, : Springer
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"Plasma etching" is one of the 293,135 book subjects in our database.
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This dashboard is based on data from: The British Library.
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