Microlithography
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ShareCopied to clipboardMicrolithography is a book subject. It includes 14 books, written by 10 different authors.
Key facts
- number of authors: 10 people
- number of books: 14
- books: Ätzverfahren für die Mikrotechnik, Etching in microsystem technology, Field guide to optical lithography
- authors: J. Michael Köhler, Chris A. Mack
- publication dates: 1998, 1999, 2006
- book publishers: Wiley-VCH, SPIE Press
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"Microlithography" is one of the 293,135 book subjects in our database.
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This dashboard is based on data from: The British Library.
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