Lithography, Electron beam
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ShareCopied to clipboardLithography, Electron beam is a book subject. It includes 4 books, written by 4 different authors.
Key facts
- number of authors: 4 people
- number of books: 4
- books: Design technology co-optimization in the era of sub-resolution IC scaling, Patterning of material layers in submicron region, Resists in microlithography and printing
- authors: Lars W. Liebmann, U. S. Tandon, Bohumil Bednár
- publication dates: 2016, 1993, 1993
- book publishers: Eurospan, Wiley, North-Holland Biomedical Press
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