Extreme ultraviolet lithography
ShareCopied to clipboardExtreme ultraviolet lithography is a book subject. It includes 3 books, written by 3 different authors.
Key facts
- number of authors: 3 people
- number of books: 3
- books: Efficient extreme ultraviolet mirror design : an FDTD approach, Extreme ultraviolet lithography, Optical and EUV lithography : a modeling perspective
- authors: Yen-Min Lee, Harry J. Levinson, Andreas Erdmann
- publication dates: 2021, 2020, 2021
- book publishers: IOP Publishing, SPIE Press
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"Extreme ultraviolet lithography" is one of the 293,135 book subjects in our database.
This dashboard is based on data from: The British Library.
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