Chemical mechanical planarization
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ShareCopied to clipboardChemical mechanical planarization is a book subject. It includes 5 books, written by 4 different authors.
Key facts
- number of authors: 4 people
- number of books: 5
- books: Advances in chemical mechanical planarization (CMP, Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
- authors: S. V. Babu, Ungyu Paik
- publication dates: 2016, 2009, 2019
- book publishers: Woodhead Publishing, C R C, Taylor&Francis
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"Chemical mechanical planarization" is one of the 293,135 book subjects in our database.
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