CMOS cantilever sensor systems : atomic-force microscopy and gas sensing applications
CMOS cantilever sensor systems : atomic-force microscopy and gas sensing applications is a book. It was written by Dirk Lange and published by : Springer in 2002.
Key facts
- author: Dirk Lange
- publication date: 2002
- book publisher: : Springer
- book series: Microtechnology and MEMS
- book subjects: Metal oxide semiconductors, Complementary-Design and construction, Microelectromechanical systems-Design and construction, Gas detectors-Design and construction
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"CMOS cantilever sensor systems : atomic-force microscopy and gas sensing applications" is one of the books by Dirk Lange, books by : Springer and 2,617,384 books in our database.
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This content is available under the CC BY 4.0 license.