Atomic layer deposition : principles, characteristics, and nanotechnology applications
Atomic layer deposition : principles, characteristics, and nanotechnology applications is a book. It was written by Tommi Kääriäinen and published by Scrivener Publishing in 2013.
Key facts
- author: Tommi Kääriäinen
- publication date: 2013
- book publisher: Scrivener Publishing
- book series: unknown
- book subjects: Nanotechnology, Microelectronics, Epitaxy
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"Atomic layer deposition : principles, characteristics, and nanotechnology applications" is one of the books by Tommi Kääriäinen, books by Scrivener Publishing and 2,617,384 books in our database.
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