3D and circuit integration of MEMS
3D and circuit integration of MEMS is a book. It was written by Masayoshi Esashi and published by Wiley-VCH in 2021.
Key facts
- author: Masayoshi Esashi
- publication date: 2021
- book publisher: Wiley-VCH
- book series: unknown
- book subjects: Integrated circuits, Microelectromechanical systems, Metal oxide semiconductors, Complementary
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"3D and circuit integration of MEMS" is one of the books by Masayoshi Esashi, books by Wiley-VCH and 2,617,384 books in our database.
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