Physical design and mask synthesis for directed self-assembly lithography

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  • Author: Seongbo Shim
  • Isbn: 331976294X
  • Bnb id: GBB901887
  • Language: eng
  • Publication date: 2018
  • book publisher: : Springer
  • Book subject: Engineering, Nanotechnology, Systems engineering, Materials science, Self-assembly (Chemistry), Optical materials, Integrated circuits-Design and construction, Lithography, Integrated circuits-Masks

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The British Library

Updated: 82 days ago

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