Physical design and mask synthesis for directed self-assembly lithography
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- Author: Seongbo Shim
- Isbn: 331976294X
- Bnb id: GBB901887
- Language: eng
- Publication date: 2018
- book publisher: : Springer
- Book subject: Engineering, Nanotechnology, Systems engineering, Materials science, Self-assembly (Chemistry), Optical materials, Integrated circuits-Design and construction, Lithography, Integrated circuits-Masks
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Updated: 82 days ago